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案件記録
OPTICAL DEVICES AND METHODS OF MANUFACTURE
発明審査中
20請求項 · 3 独立
§ Ⅰ
案件概要
出願人
Taiwan Semiconductor Manufacturing Co., Ltd.
発明者
Chia-Han Tsou; Yu-Siang Lin; Ming-Fa Chen
IPC分類
G2B 6/34G2B 5/18
CPC分類
G2B6/34G2B5/1847
A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.
原文（中国語）
A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.
外部リソース