PASSIVE ACTUATION TO CORRECT FOR ERROR CONTRIBUTORS IN AN ALIGNMENT-CRITICAL SYSTEM THROUGH USE OF A SAMPLE MATERIAL

原文（中国語）

Systems and methods for operating a system. The systems comprise: at least two optical components; a support structure configured to structurally support the at least two optical components in a spaced apart arrangement (the support structure comprising a material having at least one geometric dimension that varies throughout a lifespan of the system); and a displacement compensator disposed between the support structure and at least one optical component of the at least two optical components, and configured to passively and/or actively maintain an alignment of the at least two optical components, despite variations of the at least one geometric dimension of the support structure; wherein the displacement compensator is configured to apply pushing forces or pulling forces on the optical component(s) responsive to physical changes of a material sample formed of a same material as the support structure.