FIBER COUPLED RADICAL DETECTION

原文（中国語）

Embodiments described herein relate to an apparatus that includes a chamber, and a molecular radical detector coupled to the chamber. In an embodiment, the molecular radical detector includes a diode laser, and a periodically poled lithium niobate (PPLN) waveguide coupled to the diode laser by a first optical fiber. In an embodiment, a filter is optically coupled to the PPLN waveguide by a second optical fiber, and a detector is optically coupled to the filter. In an embodiment, the PPLN waveguide is configured to frequency double a beam originating from the diode laser before the beam passes through an optical port in the chamber. In an embodiment, the detector is configured to receive the beam after the beam passes through the chamber.