TEMPERATURE CONTROL SYSTEM

原文（中国語）

A temperature control system includes a temperature control base bonded to a bottom of a maintenance plate, a first chiller configured to control a temperature of a first fluid, a second chiller configured to control a temperature of a second fluid, a temperature control unit configured to heat or cool the first fluid or the second fluid flowing into a flow path defined in the temperature control base to have a target temperature, and a distribution-direction switching unit configured to control a distribution direction of each fluid. The distribution-direction switching unit distributes the second fluid in a first direction from a central side of the temperature control base toward an outer circumferential side in a temperature raising operation, and distributes the first fluid in a second direction opposite to the first direction in a temperature lowering operation.