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案件記録

SEMICONDUCTOR DEVICE AND METHOD OF ION IMPLEMENTATION IN A SEMICONDUCTOR DEVICE

発明審査中
1閲覧数
18請求項 · 2 独立
§ Ⅰ

案件概要

IPC分類

H1L 21/266H10D 12/H10D 62/60H10D 84/H10D 84/1

CPC分類

H1L21/266H10D12/481H10D62/60H10D84/109H10D84/161

The present disclosure relates to a semiconductor device, such as a Reverse Conducting Insulated Gate Bipolar Transistor (RC-IGBT), and method of ion implementation in a semiconductor device, especially implementation of light ion particles. A semiconductor device is proposed, including a semiconductor structure layer and a metal electrode on at least one surface of the semiconductor layer, wherein the metal electrode includes at least one thin metal electrode section and at least one thick metal electrode section. Preferably the at least one thin metal electrode section has a thickness of 4 to 7 μm and the at least one thick metal electrode section has a thickness of 9 to 14 μm.

原文(中国語)

The present disclosure relates to a semiconductor device, such as a Reverse Conducting Insulated Gate Bipolar Transistor (RC-IGBT), and method of ion implementation in a semiconductor device, especially implementation of light ion particles. A semiconductor device is proposed, including a semiconductor structure layer and a metal electrode on at least one surface of the semiconductor layer, wherein the metal electrode includes at least one thin metal electrode section and at least one thick metal electrode section. Preferably the at least one thin metal electrode section has a thickness of 4 to 7 μm and the at least one thick metal electrode section has a thickness of 9 to 14 μm.

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