SEMICONDUCTOR DEVICE AND METHOD OF ION IMPLEMENTATION IN A SEMICONDUCTOR DEVICE
案件概要
発明者
Katsuaki Saito
IPC分類
CPC分類
The present disclosure relates to a semiconductor device, such as a Reverse Conducting Insulated Gate Bipolar Transistor (RC-IGBT), and method of ion implementation in a semiconductor device, especially implementation of light ion particles. A semiconductor device is proposed, including a semiconductor structure layer and a metal electrode on at least one surface of the semiconductor layer, wherein the metal electrode includes at least one thin metal electrode section and at least one thick metal electrode section. Preferably the at least one thin metal electrode section has a thickness of 4 to 7 μm and the at least one thick metal electrode section has a thickness of 9 to 14 μm.
原文(中国語)
The present disclosure relates to a semiconductor device, such as a Reverse Conducting Insulated Gate Bipolar Transistor (RC-IGBT), and method of ion implementation in a semiconductor device, especially implementation of light ion particles. A semiconductor device is proposed, including a semiconductor structure layer and a metal electrode on at least one surface of the semiconductor layer, wherein the metal electrode includes at least one thin metal electrode section and at least one thick metal electrode section. Preferably the at least one thin metal electrode section has a thickness of 4 to 7 μm and the at least one thick metal electrode section has a thickness of 9 to 14 μm.
外部リソース