検索に戻る
案件記録
END EFFECTOR
発明審査中
4閲覧数
29請求項 · 2 独立
§ Ⅰ
案件概要
発明者
Richard BLANK; Roy Scott POWELL
IPC分類
H1L 21/67B25J 11/B25J 15/B25J 19/2H1L 21/687
CPC分類
H1L21/67248B25J11/95B25J15/14B25J19/2H1L21/68707
An end effector for supporting a wafer, the end effector having a temperature sensor that is configured to sense a temperature of a wafer supported by the end effector.
原文（中国語）
An end effector for supporting a wafer, the end effector having a temperature sensor that is configured to sense a temperature of a wafer supported by the end effector.
外部リソース