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案件記録
METHODS FOR ELECTRICAL PROPERTY DEPTH PROFILING THROUGH FILMS WITH GRADED COMPOSITION
発明審査中
2閲覧数
14請求項 · 1 独立
§ Ⅰ
案件概要
発明者
Bulent M. BASOL; Abhijeet JOSHI
IPC分類
H1L 21/66G1B 7/6
CPC分類
H1L22/14G1B7/105
A method of obtaining a depth profile of an electrical property through a film with a composition varying as a function of depth is disclosed.
原文（中国語）
A method of obtaining a depth profile of an electrical property through a film with a composition varying as a function of depth is disclosed.
外部リソース