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案件記録

GLASS CORE EDGE TREATMENTS FOR HYBRID PANELS IN DEVICE PACKAGING

発明審査中
20請求項 · 3 独立
§ Ⅰ

案件概要

発明者

Shayan Kaviani; Marcel Wall; Ehsan Zamani; Mahdi Mohammadighaleni; Darko Grujicic; Rengarajan Shanmugam; Srinivas Pietambaram; Elham Tavakoli

IPC分類

H1L 23/15H1L 21/48H1L 23/H1L 23/13H1L 23/498

CPC分類

H1L23/15H1L21/481H1L23/13H1L23/49822H1L23/49827H1L24/16H1L2224/16225

Hybrid panel for integrated circuit (IC) package assembly that has one or more glass core panels within a perimeter frame. The hybrid panel may offer better handling characteristics during a build-up of metallization features and dielectric layers upon the glass core panels. A glass edge of a glass core panel may be physically and/or chemically treated to improve adhesion of the glass core panel to the perimeter frame, for example with an intervening organic dielectric material. In some embodiments, the glass core panel edge may be chamfered or beveled. A glass edge bevel or chamfer may further have enhanced surface roughness. In some embodiments, a glass edge is chemically functionalized with surface groups, for example through plasma oxidation. An edge-treated glass core panel may be assembled with a frame that has a complementary recessing or protruding interior sidewall adjacent to the glass core panel.

原文(中国語)

Hybrid panel for integrated circuit (IC) package assembly that has one or more glass core panels within a perimeter frame. The hybrid panel may offer better handling characteristics during a build-up of metallization features and dielectric layers upon the glass core panels. A glass edge of a glass core panel may be physically and/or chemically treated to improve adhesion of the glass core panel to the perimeter frame, for example with an intervening organic dielectric material. In some embodiments, the glass core panel edge may be chamfered or beveled. A glass edge bevel or chamfer may further have enhanced surface roughness. In some embodiments, a glass edge is chemically functionalized with surface groups, for example through plasma oxidation. An edge-treated glass core panel may be assembled with a frame that has a complementary recessing or protruding interior sidewall adjacent to the glass core panel.

外部リソース