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案件記録

PACKAGING SUBSTRATE AND SEMICONDUCTOR PACKAGE COMPRISING SAME

発明審査中
1閲覧数
10請求項 · 1 独立
§ Ⅰ

案件概要

発明者

Jincheol KIM; SeHan Yun; Jungju JO; Tae Kyoung KIM; Jun Rok OH

IPC分類

H1L 23/15H1L 23/498

CPC分類

H1L23/15H1L23/498

A packaging substrate according to the present disclosure includes a glass core and an insulating layer disposed on the glass core. The glass core has a thickness of 100 μm or more. The insulating layer has an HEI value, which is the heat-resistant elasticity index of Equation 1 below, of 1.2 or more. HEI=TgE CTE× [ ]Equation⁢in Equation 1, Tg is the glass transition temperature (unit: ° C.), E is the elastic modulus (unit: GPa) measured at 23° C., and CTE is the coefficient of thermal expansion (ppm/° C.). In this case, damage to the glass core during a process of forming a redistribution layer can be effectively suppressed.

原文(中国語)

A packaging substrate according to the present disclosure includes a glass core and an insulating layer disposed on the glass core. The glass core has a thickness of 100 μm or more. The insulating layer has an HEI value, which is the heat-resistant elasticity index of Equation 1 below, of 1.2 or more. HEI=TgE CTE× [ ]Equation⁢in Equation 1, Tg is the glass transition temperature (unit: ° C.), E is the elastic modulus (unit: GPa) measured at 23° C., and CTE is the coefficient of thermal expansion (ppm/° C.). In this case, damage to the glass core during a process of forming a redistribution layer can be effectively suppressed.

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