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案件記録

PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME

発明審査中
11閲覧数
20請求項 · 3 独立
§ Ⅰ

案件概要

発明者

Yu-Jie Lin; Yi-Feng Hsu; Kai-Kuang Ho

IPC分類

H1L 23/528H1L 21/48H1L 23/H1L 23/31H1L 23/49H1L 23/532H1L 25/H1L 25/10

CPC分類

H1L23/528H1L21/4889H1L23/3107H1L23/49H1L23/53295H1L24/20H1L25/105H1L25/50H1L2224/211H1L2225/1041

Disclosed is a package structure, including: a substrate; a first dielectric layer on the substrate; a second dielectric layer on the first dielectric layer; a multilayer wiring layer in the first dielectric layer and the second dielectric layer; an I/O pad in the first dielectric layer, and a portion of a top surface of the I/O pad is covered by the second dielectric layer; a probe pad in the first dielectric layer and the second dielectric layer, wherein a top surface of the probe pad is higher than the top surface of the I/O pad, and is coplanar with a top surface of the second dielectric layer, and the top surface of the I/O pad is coplanar with a top surface of the first dielectric layer; and an I/O opening is disposed in the second dielectric layer to expose the I/O pad.

原文(中国語)

Disclosed is a package structure, including: a substrate; a first dielectric layer on the substrate; a second dielectric layer on the first dielectric layer; a multilayer wiring layer in the first dielectric layer and the second dielectric layer; an I/O pad in the first dielectric layer, and a portion of a top surface of the I/O pad is covered by the second dielectric layer; a probe pad in the first dielectric layer and the second dielectric layer, wherein a top surface of the probe pad is higher than the top surface of the I/O pad, and is coplanar with a top surface of the second dielectric layer, and the top surface of the I/O pad is coplanar with a top surface of the first dielectric layer; and an I/O opening is disposed in the second dielectric layer to expose the I/O pad.

外部リソース