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案件記録

METHOD OF BONDING A FIRST SUBSTRATE TO A SECOND SUBSTRATE, BONDING APPARATUS AND ASSEMBLY OF FIRST AND SECOND SUBSTRATES

発明審査中
2閲覧数
14請求項 · 2 独立
§ Ⅰ

案件概要

発明者

Markus WIMPLINGER; Christian MÜHLSTÄTTER

IPC分類

H1L 23/

CPC分類

H1L24/80H1L24/74H1L2224/74H1L2224/80006H1L2224/80895H1L2224/80896

A method of bonding a first substrate () to a second substrate (), the first substrate wherein preferably a subsection of the second substrate () in the second partial section is vertically offset with respect to a subsection of the second substrate () in the first partial portion in a direction perpendicular to a main extension plane, and wherein for the relative alignment of the primary section and the secondary section with respect to one another, in particular with respect to a direction running essentially parallel to the bonding direction, a first curvature of the first substrate () and/or a second curvature of the second substrate () is modified by means of a deformation system in a region adjacent to the bond wave () and/or in a region including the bond wave ().

原文(中国語)

A method of bonding a first substrate () to a second substrate (), the first substrate wherein preferably a subsection of the second substrate () in the second partial section is vertically offset with respect to a subsection of the second substrate () in the first partial portion in a direction perpendicular to a main extension plane, and wherein for the relative alignment of the primary section and the secondary section with respect to one another, in particular with respect to a direction running essentially parallel to the bonding direction, a first curvature of the first substrate () and/or a second curvature of the second substrate () is modified by means of a deformation system in a region adjacent to the bond wave () and/or in a region including the bond wave ().

外部リソース