LAMÉ MODE RESONATOR WITH ALUMINUM NITRIDE (AlN) MIRROR LAYER
案件概要
発明者
Ralph DURNER
IPC分類
CPC分類
Aspects include devices and methods for a resonator with an aluminum nitride mirror layer. Some aspects may include an aluminum nitride layer formed on or above a substrate, an electrode layer formed on or above the aluminum nitride layer opposite the substrate, a piezoelectric layer formed on the electrode layer, and an interdigital transducer formed on the piezoelectric layer.
原文（中国語）
Aspects include devices and methods for a resonator with an aluminum nitride mirror layer. Some aspects may include an aluminum nitride layer formed on or above a substrate, an electrode layer formed on or above the aluminum nitride layer opposite the substrate, a piezoelectric layer formed on the electrode layer, and an interdigital transducer formed on the piezoelectric layer.
外部リソース