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案件記録

CAPACITOR STRUCTURE AND SEMICONDUCTOR MEMORY DEVICE INCLUDING THE SAME

発明審査中
1閲覧数
20請求項 · 3 独立
§ Ⅰ

案件概要

発明者

Min Hee CHO; Tae Jin PARK

IPC分類

H10D 1/68H10B 12/

CPC分類

H10D1/716H10B12/312H10B12/37H10B12/482H10B12/488

There is provided a capacitor structure which is formed using a fabricating method in which a plate electrode is formed before a capacitor dielectric film. The capacitor structure includes a plate electrode which defines an electrode mold trench, an electrode mold insulating pattern which is in contact with the plate electrode, and includes a side wall part disposed on a side wall of the electrode mold trench, and a bottom part disposed on a bottom face of the electrode mold trench, a first capacitor electrode which is disposed on the bottom part of the electrode mold insulating pattern, and extends in a first direction, a capacitor dielectric film which is disposed on the side wall of the first capacitor electrode, and a second capacitor electrode which is disposed on the capacitor dielectric film and connected to the plate electrode.

原文(中国語)

There is provided a capacitor structure which is formed using a fabricating method in which a plate electrode is formed before a capacitor dielectric film. The capacitor structure includes a plate electrode which defines an electrode mold trench, an electrode mold insulating pattern which is in contact with the plate electrode, and includes a side wall part disposed on a side wall of the electrode mold trench, and a bottom part disposed on a bottom face of the electrode mold trench, a first capacitor electrode which is disposed on the bottom part of the electrode mold insulating pattern, and extends in a first direction, a capacitor dielectric film which is disposed on the side wall of the first capacitor electrode, and a second capacitor electrode which is disposed on the capacitor dielectric film and connected to the plate electrode.

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