検索に戻る
案件記録

BACKSIDE SUBSTRATE DIELECTRIC BREAK

発明審査中
1閲覧数
20請求項 · 3 独立
§ Ⅰ

案件概要

発明者

Masoud Zabihi; Ruilong Xie; Robert Gauthier; Anindya Nath; Anthony I-Chih Chou

IPC分類

H1L 29/6H1L 21/8238H1L 23/522H1L 23/528H1L 27/92H1L 29/423H1L 29/66H1L 29/775H1L 29/786

CPC分類

H10D62/115H1L23/5226H1L23/5283H10D30/14H10D30/43H10D30/6735H10D30/6757H10D62/121H10D84/17H10D84/186H10D84/188H10D84/38H10D84/85

A semiconductor device includes a passive device including a set of P-type doped regions, a set of N-type doped regions, a first N-well region and a second N-well region below the set of P-type doped regions and the set of N-type doped region, respectively, a first shallow trench isolation (STI) between the first N-well region and the second N-well region, a substrate below the first STI; and a dielectric break within the substrate. The dielectric break is vertically extended from the first STI to a bottom interlayer dielectric (BILD) below the substrate.

原文(中国語)

A semiconductor device includes a passive device including a set of P-type doped regions, a set of N-type doped regions, a first N-well region and a second N-well region below the set of P-type doped regions and the set of N-type doped region, respectively, a first shallow trench isolation (STI) between the first N-well region and the second N-well region, a substrate below the first STI; and a dielectric break within the substrate. The dielectric break is vertically extended from the first STI to a bottom interlayer dielectric (BILD) below the substrate.

外部リソース