METHOD FOR MANUFACTURING AN OPTOELECTRONIC DEVICE COMPRISING AN LED AND A PHOTODIODE
案件概要
出願人
Commissariat à I'Énergie Atomique et aux Énergies Alternatives
発明者
Julia Simon; Fabian Rol; Patrick Le Maitre
IPC分類
CPC分類
A a method for manufacturing an optoelectronic device including at least one LED and at least one photodiode, including the following consecutive steps: a) epitaxially forming an active semiconductor emitting and receiving stack common to the LED and photodiode; b) forming trenches extending vertically through the active stack, and laterally delimiting the LED and photodiode, wherein the trenches are arranged so that the lateral dimensions of the LED are smaller than the lateral dimensions of the photodiode.
原文（中国語）
A a method for manufacturing an optoelectronic device including at least one LED and at least one photodiode, including the following consecutive steps: a) epitaxially forming an active semiconductor emitting and receiving stack common to the LED and photodiode; b) forming trenches extending vertically through the active stack, and laterally delimiting the LED and photodiode, wherein the trenches are arranged so that the lateral dimensions of the LED are smaller than the lateral dimensions of the photodiode.
外部リソース