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案件記録

MESA POROSIFICATION PROCESS

発明審査中
11閲覧数
10請求項 · 2 独立
§ Ⅰ

案件概要

発明者

Carole Pernel; Margaux Audibert; Valentin Vivares

IPC分類

H10H 20/818H10H 20/1H10H 20/825

CPC分類

H10H20/818H10H20/137H10H20/825

A process for porosifying a structure including a base substrate covered with mesas, the mesas being (Al, In, Ga)N or InP mesas or (Al, In, Ga)N/(Al, In, Ga)N or InP/InP mesas, the mesas being electrochemically porosified according to the following cycle of steps: i) applying a first potential for a first duration, ii) applying a second potential for a second duration, whereby porosified mesas are obtainedincluding, from the side faces of the mesas towards the center of the mesas or vice versa, a first portion having a first porosification ratio and a second portion, the second portion having a second porosification ratio higher than the first porosification ratio or the second portion being hollowed out.

原文(中国語)

A process for porosifying a structure including a base substrate covered with mesas, the mesas being (Al, In, Ga)N or InP mesas or (Al, In, Ga)N/(Al, In, Ga)N or InP/InP mesas, the mesas being electrochemically porosified according to the following cycle of steps: i) applying a first potential for a first duration, ii) applying a second potential for a second duration, whereby porosified mesas are obtainedincluding, from the side faces of the mesas towards the center of the mesas or vice versa, a first portion having a first porosification ratio and a second portion, the second portion having a second porosification ratio higher than the first porosification ratio or the second portion being hollowed out.

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