Filter unit, preparation method thereof and electronic equipment

The invention provides a filter unit, a preparation method thereof and electronic equipment, and relates to the technical field of radio frequency micro electro mechanical systems. The substrate is arranged on one side of the resonant structure, the substrate comprises a modified structure and a supporting structure surrounding the modified structure, and a cavity is formed between the modified structure and the resonant structure. According to the filter unit provided by the invention, the cavity is formed between the modified structure and the resonant structure, so that the technological preparation flow can be greatly simplified, and the technological process difficulty is reduced.