Coating thickness detection method and device, computer readable storage medium and system
データ提供元:EPO OPS
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案件概要
出願番号
CN202411171306
発明者
HUANG YUNLONG; HUI TAO; LIU ZHIWEN; CHEN XI
出願日
Aug 26, 2024
公開日
Sep 24, 2024
パテントファミリーID
92774784
IPC分類
CPC分類
The invention relates to a coating thickness detection method and device, a computer readable storage medium and a system. The method comprises the following steps: acquiring first distance information between a time-domain spectrum probe and an alignment point on a pole piece coating and coating thickness information at the alignment point acquired by the time-domain spectrum probe; acquiring a plurality of pieces of phase difference information acquired by the frequency domain spectrum probe array; and performing thickness detection according to the first distance information, the coating thickness information at the alignment point and the plurality of pieces of phase difference information to obtain coating thickness information at a plurality of non-alignment points. According to the invention, the accuracy of coating thickness measurement can be improved.
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