Photocathode, electron source module and electronic equipment
データ提供元:EPO OPS
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案件概要
出願番号
CN202310335695
発明者
ZHANG ZE; HE YIZUN; XIAO XIANG; HE ZHENGYU
出願日
Mar 24, 2023
公開日
Sep 24, 2024
パテントファミリーID
92765284
IPC分類
CPC分類
The embodiment of the invention provides a photocathode, an electron source module and electronic equipment, relates to the technical field of electron beam emission, and is used for solving the problem that exciting light is absorbed or reflected when a photocathode electron source generates a high-resolution electron beam. The photocathode comprises a substrate, an emission layer and a first focusing layer. The first focusing layer and the substrate layer are stacked on the same side of the emission layer. Excitation light provided by the light source passes through the first focusing layer before passing through the substrate and reaching the emission layer. The first focusing layer comprises a plurality of first focusing microstructures, and the first focusing microstructures can focus exciting light from the light source and then transmit the exciting light to the emission layer so as to provide electron beams.
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