원래 이름 기록: IMEC VZW

Electronic-photonic systems including an integrated device, and methods for manufacturing the integrated device, are provided. In one aspect, the integrated device includes an electronic integrated circuit (EIC) and a photonic integrated circuit (PIC) bonded and electrically connected to the EIC. The PIC includes a waveguide and a heater configured to heat the waveguide. The integrated device includes one or more cavities arranged between the heater and the EIC for thermally isolating the heater from the EIC.