№ EP4675015A1발명
심사 중SURFACE-TREATED ALUMINUM MATERIAL, PRODUCTION METHOD FOR SAME, AND MEMBER FOR SEMICONDUCTOR PROCESSING DEVICE
SURFACE-TREATED ALUMINUM MATERIAL, PRODUCTION METHOD FOR SAME, AND MEMBER FOR SEMICONDUCTOR PROCESSING DEVICE
❖UACJ Corporation; National University Corporation
Hokkaido UniversityNAKAJIMA, Daiki; KIKUCHI, TatsuyaJan 6, 2026C25D17