№ EP4675675A1발명
심사 중A METHOD FOR PRODUCING CONDUCTIVE LINES IN AN INTERCONNECT STRUCTURE OF A SEMICONDUCTOR CHIP
A METHOD FOR PRODUCING CONDUCTIVE LINES IN AN INTERCONNECT STRUCTURE OF A SEMICONDUCTOR CHIP
❖Imec VZWGupta, Anshul; Tokei, Zsolt; Decoster, Stefan; Delie, Gilles; Kundu, SouvikJan 6, 2026H01L, H01L17