METHOD OF STORING HIGH PURITY ALKYL TIN COMPOUNDS
METHOD OF STORING HIGH PURITY ALKYL TIN COMPOUNDS
Monoalkyl tin triamide compounds having purity of at least about 99 mol % and the chemical formula RSn(NMe)are described. Ris selected from R, Rand R; Ris a primary alkyl group having about 1 to 10 carbon atoms, Ris a secondary alkyl group having about 3 to 10 carbon atoms, and Ris a tertiary alkyl group having about 3 to 10 carbon atoms; each Ris independently an alkyl group having about 1 to 10 carbon atoms; and a content of RSn(NR)(N(R)CHNR) is less than about 1 mol %. Methods for synthesizing, purifying, and storing these compounds are also provided. The monoalkyl tin compounds may be used for the formation of high-resolution EUV lithography patterning precursors and are attractive due to their high purity and minimal concentration of dialkyl tin and other tin impurities.