№ US20260005671A1발명
심사 중LAMÉ MODE RESONATOR WITH ALUMINUM NITRIDE (AlN) MIRROR LAYER
LAMÉ MODE RESONATOR WITH ALUMINUM NITRIDE (AlN) MIRROR LAYER
Aspects include devices and methods for a resonator with an aluminum nitride mirror layer. Some aspects may include an aluminum nitride layer formed on or above a substrate, an electrode layer formed on or above the aluminum nitride layer opposite the substrate, a piezoelectric layer formed on the electrode layer, and an interdigital transducer formed on the piezoelectric layer.
❖RF360 Singapore Pte. Ltd.Ralph DURNER§ 3/20 청구항H3H 9/17, H3H 3/2, H3H 9/2 +18