MANIFOLD ASSEMBLIES, REACTOR SYSTEMS INCLUDING MANIFOLD ASSEMBLIES, AND ASSOCIATED METHODS FOR SUPPLYING A GAS MIXTURE TO A REACTION CHAMBER
개요
발명자
Jing Yuan; Wentao Wang; Parneet Singh Chawla; Aditya Chaudhury; Junwei Su; Alexandros Demos
IPC 분류
CPC 분류
Manifold assemblies, reactor systems including manifold assemblies and associated method for supplying a gas mixture to a reaction chamber employing manifold assemblies are disclosed. The manifold assemblies disclosed include a first gas injection port for introducing a first gas into a manifold body and a second gas injection port for introducing a second gas into the manifold body and a plenum for mixing the first gas and the second gas. Reactor systems including manifold assemblies are disclosed and methods for supplying a gas mixture to reaction chamber employing a manifold assembly are disclosed.
원문 (중국어)
Manifold assemblies, reactor systems including manifold assemblies and associated method for supplying a gas mixture to a reaction chamber employing manifold assemblies are disclosed. The manifold assemblies disclosed include a first gas injection port for introducing a first gas into a manifold body and a second gas injection port for introducing a second gas into the manifold body and a plenum for mixing the first gas and the second gas. Reactor systems including manifold assemblies are disclosed and methods for supplying a gas mixture to reaction chamber employing a manifold assembly are disclosed.