RETAINER RING FOR POLISHING HEAD
개요
발명자
Han Kim; Youngtaek Kim; Suyong Heo; Sungyong Park; Chansoo Park; Kyoungwhan Oh; Hoseop Choi
IPC 분류
CPC 분류
The present inventive concept provides a retainer ring for a polishing head, the retainer ring including: a ring-shaped body including a pressure surface having a plurality of first regions and a plurality of second regions alternately positioned in a circumferential direction of the body; a plurality of slurry grooves disposed in the pressure surface to be spaced apart from each other in the circumferential direction of the body and extending from an inner circumferential surface of the body to an outer circumferential surface of the body; and a plurality of rounded grooves disposed in the plurality of first regions and directly connected to the inner circumferential surface of the body, each of the plurality of rounded grooves having a concave groove surface rounded in a cross-sectional view taken along a radial direction of the body.
원문 (중국어)
The present inventive concept provides a retainer ring for a polishing head, the retainer ring including: a ring-shaped body including a pressure surface having a plurality of first regions and a plurality of second regions alternately positioned in a circumferential direction of the body; a plurality of slurry grooves disposed in the pressure surface to be spaced apart from each other in the circumferential direction of the body and extending from an inner circumferential surface of the body to an outer circumferential surface of the body; and a plurality of rounded grooves disposed in the plurality of first regions and directly connected to the inner circumferential surface of the body, each of the plurality of rounded grooves having a concave groove surface rounded in a cross-sectional view taken along a radial direction of the body.