PAD-SURFACE DETERMINATION METHOD AND PAD-SURFACE DETERMINATION SYSTEM
개요
출원인
EBARA CORPORATION
발명자
Toshifumi KIMBA; Kohei OHSHIMA
IPC 분류
CPC 분류
A pad-surface determination method that can appropriately determine a surface property of a polishing pad including a condition of protrusions formed on a polishing surface of the polishing pad is disclosed. The pad-surface determination method includes: irradiating a target area in the polishing surface with a plurality of lights from a plurality of light emitters at different incident angles; receiving a plurality of reflected lights from the target area by an imaging device; generating a plurality of images corresponding to the different incident angles by the imaging device; and determining the surface property of the polishing pad based on at least one of the plurality of images. A protrusion is formed on the polishing surface in the target area.
원문 (중국어)
A pad-surface determination method that can appropriately determine a surface property of a polishing pad including a condition of protrusions formed on a polishing surface of the polishing pad is disclosed. The pad-surface determination method includes: irradiating a target area in the polishing surface with a plurality of lights from a plurality of light emitters at different incident angles; receiving a plurality of reflected lights from the target area by an imaging device; generating a plurality of images corresponding to the different incident angles by the imaging device; and determining the surface property of the polishing pad based on at least one of the plurality of images. A protrusion is formed on the polishing surface in the target area.