FUNCTIONALIZED OXOACID LUBRICANTS IN MEMS DEVICES
개요
발명자
John Faruk ALPTEKIN; Uroob HARIS; Muralidhar HANABE
IPC 분류
CPC 분류
In examples, a microelectromechanical systems (MEMS) device comprises a moveable element configured to contact a portion of a surface, and a film formed of a self-assembled lubricant, the lubricant comprising a compound having (i) an oxoacid moiety and (ii) a hydrophobic moiety with an A value of equal to or greater than about 3 kilocalories/mole on the portion of the surface.
원문 (중국어)
In examples, a microelectromechanical systems (MEMS) device comprises a moveable element configured to contact a portion of a surface, and a film formed of a self-assembled lubricant, the lubricant comprising a compound having (i) an oxoacid moiety and (ii) a hydrophobic moiety with an A value of equal to or greater than about 3 kilocalories/mole on the portion of the surface.