MICRO-ELECTROMECHANICAL GYROSCOPE WITH IN-PLANE ACTUATION AND PITCH/ROLL SENSING

원문 (중국어)

A micro-electromechanical gyroscope includes a supporting body and a sensor assembly. The sensor assembly includes a transduction mass, constrained to the supporting body for oscillation along a first driving axis perpendicular to the supporting body and along a sensing axis perpendicular to the first driving axis, driving structures each having an actuator, and a driving mass and motion conversion flexures connecting the driving mass to the transduction mass. The actuator causes the driving mass to oscillate along a second driving axis perpendicular to the first driving axis and the sensing axis. The motion conversion flexures cause movements of the transduction mass along the first driving axis in response to movements of the driving mass along the second driving axis. Sensing structures are mechanically coupled to the transduction mass and have a variable capacitance depending on a position of the transduction mass along the sensing axis.