MEMS DEVICE WITH RESONATING STRUCTURE

원문 (중국어)

A MEMS device is provided that includes a structure that is configured to undergo bending oscillation in a plane. The structure includes a first end, a second end, a first side region, a second side region and a central region that extends from the first end to the second end between the first side region and the second side region. The central region comprises one or more openings that extend through the structure.