DEPOSITION MASK, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC DEVICE MANUFACTURED BY USING THE SAME
개요
발명자
Jin Yong LEE
IPC 분류
CPC 분류
A deposition mask includes a mask frame with a cell opening defined therein and a membrane disposed on the mask frame. The membrane includes a cell region disposed on the cell opening, a plurality of pixel openings is defined in the cell region to be connected to the cell opening, and an interfacial residual stress between the mask frame and the membrane is in a range of about −30 MPa to about 30 MPa.
원문 (중국어)
A deposition mask includes a mask frame with a cell opening defined therein and a membrane disposed on the mask frame. The membrane includes a cell region disposed on the cell opening, a plurality of pixel openings is defined in the cell region to be connected to the cell opening, and an interfacial residual stress between the mask frame and the membrane is in a range of about −30 MPa to about 30 MPa.