DEPOSITION APPARATUS, METHOD OF MANUFACTURING DISPLAY PANEL USING THE DEPOSITION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURED BY USING THE DEPOSITION APPARATUS

원문 (중국어)

Provided are a deposition apparatus, a method of manufacturing a display panel using the deposition apparatus, and an electronic device manufactured by using the deposition apparatus. The deposition apparatus includes a deposition source configured to provide a deposition material onto a substrate, a substrate chuck configured to support the substrate such that the substrate faces the deposition source, a mask chuck disposed between the deposition source and the substrate chuck and configured to support a deposition mask such that the deposition mask faces the substrate, a substrate chuck driver configured to move the substrate chuck such that the substrate is positioned on the deposition mask, and a chuck pressurizing portion configured to apply pressure to a central portion of the substrate chuck such that the substrate chuck is convexly deformed toward the deposition mask.