PLASMA SHOWERHEAD ASSEMBLY AND METHOD OF REDUCING DEFECTS
개요
발명자
Hanhong Chen; Kenneth Brian Doering; Sanjeev Baluja; Chi-Chou Lin; Kevin Griffin; Joseph AuBuchon; Zhejun Zhang; Rohit Ode; Tejas Umesh Ulavi
IPC 분류
CPC 분류
Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. A conductive insert is disposed within at least one of the dielectric faceplate gas openings or adjacent o-rings included in the plasma showerhead assemblies.
원문 (중국어)
Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. A conductive insert is disposed within at least one of the dielectric faceplate gas openings or adjacent o-rings included in the plasma showerhead assemblies.