OPTICAL MEASURING DEVICE
개요
발명자
Jiyoung Chu; Hyungjin Kim; Minhwan Seo; Jungchul Lee; Dongyoon Koo; Sangwoo Bae; Sung Min Ahn; Seungyeol Oh; Jungyu Lee
IPC 분류
CPC 분류
An optical measuring device includes a first optical system for measuring a first alignment mark of a first object using a first illumination light, and for measuring a second alignment mark of a second object facing the first object using a second illumination light; and a second optical system for measuring the parallelism of the first object and the second object using a reference light and a measuring light. The first optical system includes a first dichroic mirror arranged in the first light path of the first illumination light; a second dichroic mirror arranged in the second light path of the second illumination light; and a folding mirror arranged in the first light path and the second light path. The second optical system includes the first dichroic mirror, the second dichroic mirror, and the folding mirror arranged on a third light path of the measuring light.
원문 (중국어)
An optical measuring device includes a first optical system for measuring a first alignment mark of a first object using a first illumination light, and for measuring a second alignment mark of a second object facing the first object using a second illumination light; and a second optical system for measuring the parallelism of the first object and the second object using a reference light and a measuring light. The first optical system includes a first dichroic mirror arranged in the first light path of the first illumination light; a second dichroic mirror arranged in the second light path of the second illumination light; and a folding mirror arranged in the first light path and the second light path. The second optical system includes the first dichroic mirror, the second dichroic mirror, and the folding mirror arranged on a third light path of the measuring light.