POSITION SENSING OF MEMS MOVING STRUCTURES

원문 (중국어)

The disclosure pertains to a deflectable micro-mechanical system with integrated piezoresistive deflection sensor, the system comprising, a deflectable element; a first anchor element and a second anchor element, a first spring having a deformable region and coupling the deflectable element to the first anchor element and a second spring that having a deformable region and coupling the deflectable element to the second anchor element. When the relative position of the deflectable element to the anchor element changes, the deformable region of the first spring and the deformable region on the second spring deform. At least one of the first spring and second spring are piezoresistive and the piezo-resistance of the piezoresistive springs changes when the deformable region of the first spring and the deformable region of the second spring deforms. A first contact and a second contact are located on the first anchor element and second anchor element, respectively. The first contact is in electrical connection with the first anchor element and the second contact is in electrical connection with the second anchor element. The first contact and second contact are electrically coupled to a resistance detection circuit configured to detect the overall piezo resistance change of the first spring and second spring and using the piezo resistance change to determine the deflection of the deflectable element.