Semiconductor Workpiece Inspection System
개요
발명자
Jared A. Langan; Charles Henry Van Brackle; Edward Robert Van Brunt
IPC 분류
CPC 분류
Semiconductor workpiece inspection systems are provided. In some examples, a semiconductor workpiece inspection system includes a radiation source configured to provide electromagnetic radiation to a semiconductor workpiece. In some implementations, the example semiconductor workpiece inspection system includes an imaging device configured to capture an image of at least a portion of the semiconductor workpiece. In some implementations, the radiation source is configured to provide the electromagnetic radiation such that the electromagnetic radiation is incident on a surface of the semiconductor workpiece at an incident angle relative to an axis normal to a major surface of the semiconductor workpiece that is in a range of about 45° to about 85°.
원문 (중국어)
Semiconductor workpiece inspection systems are provided. In some examples, a semiconductor workpiece inspection system includes a radiation source configured to provide electromagnetic radiation to a semiconductor workpiece. In some implementations, the example semiconductor workpiece inspection system includes an imaging device configured to capture an image of at least a portion of the semiconductor workpiece. In some implementations, the radiation source is configured to provide the electromagnetic radiation such that the electromagnetic radiation is incident on a surface of the semiconductor workpiece at an incident angle relative to an axis normal to a major surface of the semiconductor workpiece that is in a range of about 45° to about 85°.