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기록

SENSOR AND METHOD FOR MANUFACTURING THE SAME

발명심사 중
1조회수
20청구항 · 3 독립항
§ Ⅰ

개요

발명자

Ko YAMADA; Yumi HAYASHI; Naoki HIRAMATSU; Hiroshi HAMASAKI

IPC 분류

G1N 27/12G1N 33/

CPC 분류

G1N27/125G1N33/27

According to one embodiment, a sensor includes an element portion. The element portion includes an element layer including a first face, a first electrode, a second electrode, and a first member. The first electrode is provided on the first face. The second electrode is provided on the first face. A direction from the second electrode to the first electrode is along a first direction. The first member includes an oxide. The first face includes a first region and a second region. The first region is recessed with respect to the second region. The first region and the second region overlap at least a part of the first electrode in a third direction. At least a part of the first electrode is between the first region and the first member in the third direction.

원문 (중국어)

According to one embodiment, a sensor includes an element portion. The element portion includes an element layer including a first face, a first electrode, a second electrode, and a first member. The first electrode is provided on the first face. The second electrode is provided on the first face. A direction from the second electrode to the first electrode is along a first direction. The first member includes an oxide. The first face includes a first region and a second region. The first region is recessed with respect to the second region. The first region and the second region overlap at least a part of the first electrode in a third direction. At least a part of the first electrode is between the first region and the first member in the third direction.