CANTILEVER MOTION SENSOR
개요
발명자
Michael Szelong; Bichoy Bahr; Udit Rawat
IPC 분류
CPC 분류
A motion sensor is described including a semiconductor substrate including a cavity; a mass portion over a bottom of the cavity; a beam coupled between the mass portion and a side of the cavity; and a pair of sensing elements at a distal end of the beam away from the mass portion and being part of the beam or on two opposing sides of the beam. The motion sensor further includes a processing circuit coupled to the pair of sensing elements and configured to receive first signals from the pair of sensing elements and provide a second signal representing a measurement of a motion of the motion sensor based on the first signals.
원문 (중국어)
A motion sensor is described including a semiconductor substrate including a cavity; a mass portion over a bottom of the cavity; a beam coupled between the mass portion and a side of the cavity; and a pair of sensing elements at a distal end of the beam away from the mass portion and being part of the beam or on two opposing sides of the beam. The motion sensor further includes a processing circuit coupled to the pair of sensing elements and configured to receive first signals from the pair of sensing elements and provide a second signal representing a measurement of a motion of the motion sensor based on the first signals.