PROBE CARD AND TEST APPARATUS

원문 (중국어)

A probe card and a test apparatus are provided. The probe card may include: a substrate; a plurality of probes attached on the substrate and configured to contact conductive pads of a semiconductor device under test, wherein the plurality of probes includes a ground probe configured to contact a ground pad of the semiconductor device, and a signal probe configured to contact a signal pad of the semiconductor device; and at least one filter attached on the substrate, wherein the at least one filter is electrically coupled with the signal probe and configured to eliminate interference signals received from the signal probe.