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기록
OPTICAL DEVICES AND METHODS OF MANUFACTURE
발명심사 중
3조회수
20청구항 · 3 독립항
§ Ⅰ
개요
출원인
Taiwan Semiconductor Manufacturing Co., Ltd.
발명자
Chia-Han Tsou; Yu-Siang Lin; Ming-Fa Chen
IPC 분류
G2B 6/34G2B 5/18
CPC 분류
G2B6/34G2B5/1847
A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.
원문 (중국어)
A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.