OPTICAL ARRAY WITH SELF-ALIGNED COLLIMATED FIBERS AND MEMS MIRRORS

원문 (중국어)

An optical switching array having multiple cells of MEMs optical switching units and methods of fabricating the array is disclosed. The switching unit includes a spacer structure having an enclosed light cavity. The light cavity is defined by a first end structure, a second end structure, and side structures each attached between the first and second end structure. A first input optical fiber array is attached to a top surface over the light cavity in proximity to the first end structure. A first mirror array is attached to a bottom surface over the light cavity in proximity to the first end structure. A second mirror array is attached to the top surface over the light cavity in proximity to the second end structure. An output optical fiber array is attached to the bottom surface over the light cavity in proximity to the second end structure.