CONTROL APPARATUS, MEASUREMENT APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
개요
발명자
AKIRA EGUCHI
IPC 분류
CPC 분류
A control apparatus includes at least one memory storing instructions, and at least one processor that, upon execution of the instructions, is configured to acquire a first image by imaging using an imaging unit and first information on a region corresponding to a sample in the first image, the first image including the sample acquired at a position defocused by a first amount from an in-focus position, and acquire shape information on a shape of the sample based on the first information and the first amount.
원문 (중국어)
A control apparatus includes at least one memory storing instructions, and at least one processor that, upon execution of the instructions, is configured to acquire a first image by imaging using an imaging unit and first information on a region corresponding to a sample in the first image, the first image including the sample acquired at a position defocused by a first amount from an in-focus position, and acquire shape information on a shape of the sample based on the first information and the first amount.