RADIATION-SENSITIVE COMPOSITION, METHOD FOR FORMING PATTERN, AND ONIUM SALT
개요
발명자
Ryuichi NEMOTO; Yuichi HIKAMI; Michihiro MITA; Masayuki MIYAKE; Hajime INAMI
IPC 분류
CPC 분류
A radiation-sensitive composition includes: an onium salt represented by formula (1); a polymer including a structural unit (I) which includes an acid-dissociable group; and a solvent. Qand Qare each independently a carbon atom or a nitrogen atom, provided that at least one selected from the group consisting of Qand Qis a carbon atom; W is a monocyclic or polycyclic non-aromatic ring structure of 3 to 40 ring members together with Qand Q, and the formula between Qand Qrepresents a single bond or a double bond, Ris a monovalent organic group having 1 to 20 carbon atoms, a nitro group, a hydroxy group, an amino group, a thiol group, a cyano group, a carboxy group, or halogen atom; mis an integer of 0 to 4; and Zis a monovalent onium cation.
원문 (중국어)
A radiation-sensitive composition includes: an onium salt represented by formula (1); a polymer including a structural unit (I) which includes an acid-dissociable group; and a solvent. Qand Qare each independently a carbon atom or a nitrogen atom, provided that at least one selected from the group consisting of Qand Qis a carbon atom; W is a monocyclic or polycyclic non-aromatic ring structure of 3 to 40 ring members together with Qand Q, and the formula between Qand Qrepresents a single bond or a double bond, Ris a monovalent organic group having 1 to 20 carbon atoms, a nitro group, a hydroxy group, an amino group, a thiol group, a cyano group, a carboxy group, or halogen atom; mis an integer of 0 to 4; and Zis a monovalent onium cation.