ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
개요
발명자
Akihiro Kaneko; Akiyoshi Goto
IPC 분류
CPC 분류
An actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A) which provides increased polarity by action of an acid, an onium salt (B) represented by a formula (1) described in the Specification, and a resin (C) satisfying specified conditions, a resist film, a pattern forming method, and a method for producing an electronic device that use the actinic ray-sensitive or radiation-sensitive resin composition.
원문 (중국어)
An actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A) which provides increased polarity by action of an acid, an onium salt (B) represented by a formula (1) described in the Specification, and a resin (C) satisfying specified conditions, a resist film, a pattern forming method, and a method for producing an electronic device that use the actinic ray-sensitive or radiation-sensitive resin composition.