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기록

PHOTOSENSITIVE RESIN COMPOSITION, CURED SUBSTANCE, LAMINATE, MANUFACTURING METHOD FOR CURED SUBSTANCE, MANUFACTURING METHOD FOR LAMINATE, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE

발명심사 중
1조회수
27청구항 · 3 독립항
§ Ⅰ

개요

발명자

Atsuyasu Nozaki; Kazuya Oota; Yuta Yamakawa

IPC 분류

G3F 7/38G3F 7/4G3F 7/16G3F 7/38G3F 7/40H1L 21/27

CPC 분류

G3F7/38G3F7/45G3F7/48G3F7/168G3F7/38G3F7/40H1L21/275

A photosensitive resin composition including a resin having a repeating unit represented by Formula (1-1) and a photosensitizing agent, a cured substance obtained by curing the resin composition, a laminate including the cured substance, a manufacturing method for the cured substance, a manufacturing method for a laminate, a manufacturing method for a semiconductor device including the manufacturing method for the cured substance, and a semiconductor device including the cured substance. In Formula (1-1), Xrepresents an organic group including a structure obtained by removing two or more hydrogen atoms from a specific structure, Yrepresents an organic group including a structure obtained by removing two or more hydrogen atoms from a specific structure, R's each independently represent an organic group having a polymerizable group, m represents an integer of 0 to 4, and n represents an integer of 1 or more.

원문 (중국어)

A photosensitive resin composition including a resin having a repeating unit represented by Formula (1-1) and a photosensitizing agent, a cured substance obtained by curing the resin composition, a laminate including the cured substance, a manufacturing method for the cured substance, a manufacturing method for a laminate, a manufacturing method for a semiconductor device including the manufacturing method for the cured substance, and a semiconductor device including the cured substance. In Formula (1-1), Xrepresents an organic group including a structure obtained by removing two or more hydrogen atoms from a specific structure, Yrepresents an organic group including a structure obtained by removing two or more hydrogen atoms from a specific structure, R's each independently represent an organic group having a polymerizable group, m represents an integer of 0 to 4, and n represents an integer of 1 or more.