RESIST COMPOSITION AND PATTERN FORMING PROCESS
개요
발명자
Yutaro Otomo; Takahiro Suzuki; Kazuhiro Katayama; Takeshi Sasami; Yoshihiro Tsuji; Tatsuya Suzuki
IPC 분류
CPC 분류
A resist composition comprising a base polymer comprising repeat units consisting of a carboxylic acid anion having iodine and a specific functional group, bonded to the backbone and an organic cation and repeat units consisting of a sulfonic acid anion bonded to the backbone and a sulfonium cation has a high sensitivity and a high contrast of alkaline dissolution rate before and after exposure. A pattern of satisfactory profile with reduced LWR and improved CDU is formed therefrom.
원문 (중국어)
A resist composition comprising a base polymer comprising repeat units consisting of a carboxylic acid anion having iodine and a specific functional group, bonded to the backbone and an organic cation and repeat units consisting of a sulfonic acid anion bonded to the backbone and a sulfonium cation has a high sensitivity and a high contrast of alkaline dissolution rate before and after exposure. A pattern of satisfactory profile with reduced LWR and improved CDU is formed therefrom.