PULSE WIDTH EXTENSION SYSTEM, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

원문 (중국어)

A pulse width extension system configured to output entering pulse laser light with a pulse width thereof extended includes a pulse width extension optical system including a beam splitter and a plurality of mirrors; a case accommodating the pulse width extension optical system; at least one target allowing a part thereof irradiated with the pulse laser light to be determined; and a target moving mechanism capable of arranging the at least one target on an optical path of the pulse laser light including the pulse width extension optical system, and retracting the at least one target from the optical path.