DUV LED ARRAY FOR AN ULTRAVIOLET-OZONE CLEANING SYSTEM
개요
발명자
Kira Purvin; Tara Chan; Mitchell Faust; Hongbo Si; Sylvi Haendel
IPC 분류
CPC 분류
An LED array can include a printed circuit board having a plurality of LED dies with a split circuit layout, one or more dome lenses, and a heat exchanger on a side of the circuit board opposite that of the LED dies. The LED array can be positioned in an inspection tool configured to inspect a reticle. Light from the LED array can be used to perform UV-ozone cleaning of the optical element using the light from the LED array.
원문 (중국어)
An LED array can include a printed circuit board having a plurality of LED dies with a split circuit layout, one or more dome lenses, and a heat exchanger on a side of the circuit board opposite that of the LED dies. The LED array can be positioned in an inspection tool configured to inspect a reticle. Light from the LED array can be used to perform UV-ozone cleaning of the optical element using the light from the LED array.