CONVEYANCE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
개요
발명자
KIMIO TAKEYA
IPC 분류
CPC 분류
The aspect of the embodiments, provides an apparatus comprising: a measurement device configured to measure foreign particles on a surface of an object; a conveyer including a holder configured to hold the object while contacting a part of the surface of the object, and configured to convey the object for which the foreign particles have been measured, while holding the object by the holder; and a controller configured to control conveying the object by the conveyer, in accordance with specific foreign particles in a contact region to which the holder contacts among the surface of the object, wherein the specific foreign particles are obtained from a measurement result of the measurement device.
원문 (중국어)
The aspect of the embodiments, provides an apparatus comprising: a measurement device configured to measure foreign particles on a surface of an object; a conveyer including a holder configured to hold the object while contacting a part of the surface of the object, and configured to convey the object for which the foreign particles have been measured, while holding the object by the holder; and a controller configured to control conveying the object by the conveyer, in accordance with specific foreign particles in a contact region to which the holder contacts among the surface of the object, wherein the specific foreign particles are obtained from a measurement result of the measurement device.