COMPUTER PROGRAM, INFORMATION PROCESSING METHOD, AND INFORMATION PROCESSING DEVICE

원문 (중국어)

The present disclosure provides a computer program, an information processing method, and an information processing device that visualize a relationship among a plurality of processing steps. The computer program causes a computer to acquire processing step groups obtained by classifying processing steps executed for processing a substrate based on a range of values of parameters for defining contents of the processing steps, and display a graphic image representing each processing step group at positions corresponding to the values of the parameters related to each processing step group in a two-dimensional or three-dimensional coordinate space obtained by dimensionally compressing a multi-dimensional space represented using the parameters.